| Cp |
process capability |
| Cpk |
process capability index |
| K |
potassium; thousand |
| P |
phosphorous |
| P/T |
precision-tolerance |
| PAB |
post-apply bake |
| PAC |
photoactive compound |
| PACVD |
plasma-assisted chemical vapor deposition |
| PA-FTIR |
photoacousticFourier transform infrared spectroscopy |
| PAG |
photoacid generator |
| PAL |
process automation language; programmable array logic; process asset library |
| PAM |
process application module |
| PAS |
photoacoustic spectroscopy |
| PAWS |
portable acoustic wave sensor |
| PBET |
Performance-Based Equipment Training |
| PBGA |
plastic ball grid array |
| PBL |
poly-buffered LOCOS |
| PBS |
photon backscattering |
| PC |
personal computer; programmable controller; process control |
| PCAD |
packaging computer-aided design |
| PCB |
printed circuit board |
| PCMP |
post-chemical mechanical polishing |
| PCMS |
plasma chemistry Monte-Carlo simulation |
| PCO |
photocatalytic oxidation |
| PCR |
principle component regression |
| PCT |
process change team |
| Pd |
palladium |
| PDC |
passive data collection |
| PDF |
portable document format |
| PDSOI |
partially depleted silicon on insulator |
| PDU |
protocol data unit |
| PDVC |
phase-dependent voltage contrast |
| PEB |
post-exposure bake |
| PECVD |
plasma-enhanced chemical vapor deposition |
| PED |
post-exposure delay |
| PEDS |
plasma-enhanced deposition system |
| PEELS |
parallel electron energy loss spectrometry |
| PEL |
permissible exposure level |
| PES |
photoelectron spectroscopy |
| PET |
post-etch treatment |
| PETEOS |
plasma-enhancedtetraethylorthosilicate |
| PFA |
perfluoroalkoxy |
| PFC |
perfluorocarbon |
| PFPE |
perfluorinated polyether |
| PGA |
pin grid array |
| P-GILD |
projection gas immersion laser doping |
| PGV |
person-guided vehicle |
| PI |
proportional integral |
| PID |
proportional integral derivative; process-induced defect |
| PIII |
plasma immersion ion implantation |
| PIND |
particle impact noise detection |
| PIP |
process-induced particle |
| PIV |
peak inverse voltage; post indicator valve |
| PLA |
programmable logic array |
| PLC |
programmable logic controller |
| PLCC |
plastic leaded chip carrier |
| PLL |
plasma lockload |
| PLS |
partial least squares; projection of latent structures |
| PLY |
photolimited yield |
| PM |
process monitor; preventive maintenance; process module |
| PMC |
process module controller |
| PMCC |
Pensky-Martens closed cup |
| PMI |
phase measuring interferometer |
| PMMA |
polymethyl methacrylate |
| PMOS |
positive channel metal-oxide semiconductor |
| PMS |
particle measuring system |
| PMT |
photomultiplier tube |
| PMTF |
Product Management Task Force |
| POR |
process-of-record |
| POU |
point-of-use |
| POUCG |
point-of-use chemical generation |
| PPE |
personal protective equipment |
| PPGA |
plastic pin grid array |
| PPID |
process program identification |
| PQFP |
plastic quad flat pack |
| PRAS |
particle reactor analysis services |
| PRB |
pseudo-random binary |
| PRBS |
pseudo-random binary sequence |
| PROM |
programmable read-only memory |
| PRSC |
parametric response surface control |
| PRV |
person rail guided vehicle |
| PS |
porous silicon |
| PSB |
phase-shifting blank |
| PSC |
porous silicon capacitor |
| PSD |
power spectral density; port status display |
| PSG |
phosphosilicate glass |
| PSII |
plasma source ion implantation |
| PSL |
polystyrene latex |
| PSLS |
polystyrene latex sphere |
| PSM |
phase-shift mask |
| Pt |
platinum |
| PTAB |
Project TechnicalAdvisory Board |
| PTC |
pre- and post-process treatment chambers |
| PTFE |
polytetrafluorethylene |
| PVA |
polyvinylacetate |
| PVC |
polyvinylchloride |
| PVD |
physical vapor deposition |
| PVDF |
polyvinylidene fluoride |
| PWB |
printed wiring board |
| PWP |
particles per wafer pass |
